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์‰๋ณด๋ ˆ๋ณผํŠธEUV ๊ฐ€๊ฒฉ (1)

์‰๋ณด๋ ˆ๋ณผํŠธ EUV์ถœ์‹œ 3,000๋งŒ์›๋Œ€

๋”๋ณด๊ธฐ ์•ˆ๋…•ํ•˜์„ธ์š”? ์‰๋ณด๋ ˆ ๋ณผํŠธ EV๋Š” ์‹ ๋ชจ๋ธ์ด, EUV์˜ ๊ฒฝ์šฐ ์‰๋ณด๋ ˆ ์ตœ์ดˆ SUV ์ „๊ธฐ์ฐจ ๋ชจ๋ธ์ด ์˜ˆ์•ฝ ์ ‘์ˆ˜๋ฅผ ์‹œ์ž‘ํ–ˆ์Šต๋‹ˆ๋‹ค!! ์ด๋ฒˆ์—๋Š” SUV์ „๊ธฐ์ฐจ ๋ชจ๋ธ ์ค„ ๊ฐ€์žฅ ํ•ฉ๋ฆฌ์ ์ธ ๊ฐ€๊ฒฉ๋Œ€๋ฅผ ๊ฐ€์ง€๊ณ  ์ €ํฌ ๊ณ์— ์ฐพ์•„์˜จ ์‰๋ณด๋ ˆ ๋ณผํŠธ EUV๋ฅผ ์‹ฌ์ธต ๋ถ„์„ํ•ด๋ณด๋Š” ์‹œ๊ฐ„ ๊ฐ€์ง€๋„๋ก ํ•˜๊ฒ ์Šต๋‹ˆ๋‹ค. ๊ฐ€์„ฑ๋น„ ์„ธ์„ธํ•˜๊ฒŒ ๋”ฐ์ง€๋ฉด์•ผ ํ˜„๊ธฐ์ฐจ์— ๋ฐ€๋ฆฌ๊ฒ ์ง€๋งŒ ์„ ํƒ์ง€์—์„œ ์ฝ”๋‚˜/๋‹ˆ๋กœ ์ œ์™ธํ•œ ๋ถ„๋“คํ•œํ…Œ๋Š” ๋‚˜๋ฆ„ ๋งŒ์กฑ์Šค๋Ÿฌ์šด ๊ตฌ์„ฑ์ด๋„ค์š” ์•„ํด๋กœ์‹ค๋ฒ„๋‚˜ ์•„์ด์Šค๋ธ”๋ฃจ๊ฐ™์€ ์ฐจ๊ฐ€์šด ๊ณ„์—ด์˜ ์ปฌ๋Ÿฌ๊ฐ€ ๊ฐ ์ ์œผ๋กœ ๋ฉ‹์žˆ๋„ค์š” ์ด๋ฒˆ ๋ณผํŠธํ˜•์ œ๊ฐ€ ํŠน๋ณ„ํ•œ๊ฑด ์•ž์ชฝ ๊นœ๋ฐ•์ด๊ฐ€ ๊ฐ„์ง€๋‚˜๋Š” ์Šค๋ฅด๋ฅต ์Šค๋ฅด๋ฅต ์ด๊ตฌ์š”. โ€‹ โ€‹ ๋ณผํŠธ EUV์˜ ํŠน์žฅ์  ์œผ๋กœ๋Š” 1) ์„œ๋ผ์šด๋“œ ๋ทฐ - ๋ณผํŠธev ์˜ต์…˜์œผ๋กœ ๋„ฃ์„์ˆ˜์žˆ์Œ, ๋ณผํŠธeuv ๊ธฐ๋ณธโ€‹ 2) ํ†ตํ’์‹œํŠธ - ๋ณผํŠธev์—†์Œ, ๋ณผํŠธeuv ์žˆ์Œ โ€‹3) ์•ž์œ ๋ฆฌ 2์ค‘์ ‘ํ•ฉ์œ ๋ฆฌ - ๋ณผํŠธev์—†..

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